SEMICON Korea 2019

Sessions Speakers Exhibitors Products Press Releases Floor Plan

S5. Contamination-free Manufacturing and CMP Technology (Room #308, COEX)

[CMP & Cleaning for Emerging Technology] As IDMs are developing and manufacturing single digit nm devices with 3 dimentions, they need new technologies to overcome its limits and obstacles. It is a challeng not only for IDM but also for suppliers who have to deliver new materials and equipments. These difficulties occurred in CFM and CMP technologies as well. However, we can find the solution for this through collaborations and discussions actively between IDM, supplier and academia. This session will provide excellent 8 presentations from experts to share the breaktrough technologies for CFM and CMP. Too see session agenda, Please Click here