SEMICON Korea 2019

Yukiteru Matsui
Chief Specialist
Toshiba Memory Corporation (invited)


Yukiteru Matsui, Ph.D. is a Chief Specialist at Toshiba Memory Corporation. He leads research and development of CMP process technology for advanced memory devices. He Joined Toshiba Corporation in 1997 and has been engaged in research and development of CMP process technology for Logic, COS sensor, 2D NAND, 3D NAND and emerging memory devices. He received his Ph.D. degree in chemical engineering from Tokyo Institute of Technology, Japan in 2011 and his Master’s degree and Bachelor’s degree in electrical engineering from Tohoku University, Japan in 1997 and 1995 respectively. Since 2016, he has been an executive committee member of International Conference on Planarization/CMP Technology (ICPT) which is the largest CMP conference in the world. He made 17 presentations with 10 invited talks in technical conferences and tutorials and published 8 papers. He holds 44 U.S. patents and has a patent attorney license (Unregistered) in Japan.

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