SEMICON Korea 2018

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Products (3)

scia Mill 200

System for large area Ion Beam Etching and Milling of single substrates up to 200 mm. A typical application is structuring of complex multilayers o... More...

scia Trim 200

Ion beam trimming tool for localized film thickness trimming in MEMS applications. Typically used for frequency trimming in manufacturing of acoust... More...

scia Magna 200

Cluster system for magnetron sputter deposition of up to 200 mm wafers. Typical applications include piezoelectric layers, optical coatings and pas... More...