SEMICON Korea 2018
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MERCURY (Pellicle/Mask Inspection System)
AUROS Technology, Inc.
(
Booth
D712
)
This is an outgoing QC solution to pellicle manufacturer as well as incoming QC solution to mask manufacturer, captive shop and every site using pe...
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OL-100n (Overlay Metrology System, 150/200mm WF)
AUROS Technology, Inc.
(
Booth
D712
)
It is a brand new metrology system for 150/200mm wafer measurement. As a newly developed system, it helps to measure overlay and CD with greatl...
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OL-300n (Overlay Metrology System, 300mm WF)
AUROS Technology, Inc.
(
Booth
D712
)
This is the 1st version of Auros metrology system. It is able to applied to the technology node from 2x to 9x nm.
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OL-600n (Overlay Metrology System, 300mm WF)
AUROS Technology, Inc.
(
Booth
D712
)
OL-600n is the 2nd version of overlay metrology system Auros Technology manufactured. It was released in 2013 and well recognized in many customer ...
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OL-700n (Overlay Metrology System, 300mm WF)
AUROS Technology, Inc.
(
Booth
D712
)
OL-700n is the 3rd generation of overlay metrology system that is manufactured by Auros Technology. It is the world best accuracy and throughput an...
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