SEMICON Korea 2018
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Coater/Developer_CLEAN TRACK LITHIUS Pro Z
TEL
(
Booth
D112
)
CLEAN TRACK LITHIUS Pro Z is TEL's most advanced 300mm process coater/developer for 20nm and beyond technology nodes.
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Plasma Etch System_Tactras
TEL
(
Booth
D112
)
Tactras is the latest etching system and is capable of the continuous vacuum transfer of 300-mm wafers. It saves energy and has achieved footprint ...
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