SEMICON Korea 2018

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Products (4)

Laser Annealing System

Ultrafast thermal treatment is required for 1x/2x nm semiconductor manufacturing process. The Novel Laser Annealing System features beam homogenize... More...

EUVO ™ (EUV Light Generation System)

The EUVO™ (Extreme Ultra Violet Oscillator) is suitable for EUV metrology application with stable and high-brightness EUV light. FST provides the w... More...

Chiller

The Chiller of FST is an equipment that improves process efficiencies by constantly maintaining inside-chamber wafer and its surrounding temperatur... More...

Pellicle

Pellicle is a thin layer protecting mask and reticles from atmosphere particles and other types of pollutions. The layer is fixed to bipolar oxidiz... More...