SEMICON Korea 2018

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Products (5)

EUV Mask backside Inspection and Cleaning System

EUV Mask backside Inspection and Cleaning System BASIC Series optimized for detection of particles on the backside of EUV masks. BASIC Series detec... More...

Phase-Shift,Transmittance Measurement System MPM

Phase-Shift, Transmittance Measurement System MPM193EX is an industry de facto standard measurement system that measures phase shift and transmitta... More...

TSVBack Grinding Process Measurement System BGM300

TSV Back Grinding Process Measurement System BGM300 measures TSV depth based on a combination of Lasertec-proprietary interferometer and IR optics.... More...

EUV Mask Blanks Inspection and Review System ABICS

EUV Mask Blanks Inspection and Review System ABICS E120 detects printable phase defects and enabling defect management for EUV mask blanks through ... More...

Mask Inspection System MATRICS X810EX Series

MATRICS X810EX Series feature high sensitivity and throughput at the lower cost of ownership targeted for 20nm-7nm design nodes with the new 213nm ... More...