SEMICON Korea 2018
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(6)
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EVG®150XT
EV Group Korea Ltd.
(
Booth
C540
)
Automated Photoresist Resist System for logic and memory advanced packaging applications
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EVG®50
EV Group Korea Ltd.
(
Booth
C540
)
Automated Metrology System for industry leading high-accuracy measurements
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IQ Aligner® NT
EV Group Korea Ltd.
(
Booth
C540
)
Automated Mask Alignment System
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EVG®7200 LA SmartNIL®
EV Group Korea Ltd.
(
Booth
C540
)
SmartNIL®-based Nanoimprint Lithography System
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EVG®850TB/DB (XT Frame)
EV Group Korea Ltd.
(
Booth
C540
)
Automated Temporary Wafer Bonding / Debonding Systems. Next-generation thin wafer processing for high-volume 3D IC manufacturing, Based on EVG’s ne...
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GEMINI®FB XT
EV Group Korea Ltd.
(
Booth
C540
)
Automated Production Fusion Wafer Bonding System combining several performance breakthroughs to surpass ITRS requirements for wafer bonding
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