SEMICON Korea 2018

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Products (3)

LOT VACUUM RD Series

LOT VACUUM's new product line which has multi-roots rotor type. In response to the demand of large-volume loadlock and FPD process, LOT VACUUM deve... More...

LOT VACUUM HD Series

The Hybrid Screw which is the combination of LOT’s unique Screw Mechanism and Lobes for lower power consumption in HD Series. Thus, we could keep t... More...

LOT VACUUM Dura Dry Series

Dura Dry series, with LOT VACUUM's unique rotor design and technology, have the strong by-product handling ability and robustness compared to any o... More...