SEMICON Korea 2018
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LOT VACUUM RD Series
LOT Vacuum Co., Ltd.
(
Booth
A618
)
LOT VACUUM's new product line which has multi-roots rotor type. In response to the demand of large-volume loadlock and FPD process, LOT VACUUM deve...
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LOT VACUUM HD Series
LOT Vacuum Co., Ltd.
(
Booth
A618
)
The Hybrid Screw which is the combination of LOT’s unique Screw Mechanism and Lobes for lower power consumption in HD Series. Thus, we could keep t...
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LOT VACUUM Dura Dry Series
LOT Vacuum Co., Ltd.
(
Booth
A618
)
Dura Dry series, with LOT VACUUM's unique rotor design and technology, have the strong by-product handling ability and robustness compared to any o...
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