SEMICON Europa 2016
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PCOX 20x
Alpsitec
(
Booth
1507
)
The Pcox20X family offers to adapt the tool capacities to process needs through the choice of the number of modules: from 1 to 4. From Pcox 200 S: standalone tool, manual loading, up to 4 modules, automatic loading and any wafer circulation inside.
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