ALPSITEC situated in Grenoble, the French Silicon Valley, has developed a complete range of CMP tools.
With 15 years’ experience in the CMP area, ALPSITEC offers customer oriented equipment, with customized tools to better fit to requirements for process of 1” to 12” and any sample shapes.
Tools:
E460 F: automatic tool, strongly R&D oriented,
E550, automatic tool, cassette to cassette, for R&D and production, (SECS/GEM)
PCOX 20X: modular polishing system: can be used as a standalone module, or as a complete production tool with I/O module and up to 4 polishing modules.
E400 E: the mini CMP tool, for products up to 4”, full automatic, with the same controls as larger tools. It will be on the booth!
New this year: Automatic loading module for the E460!
Unique Advantages, for all:
- Modularity
- Flexibility: extremely short time for changing wafer size, carrier, plate…
- Reliability: used of optimized, proven solutions
- Easy use: friendly user interface, easy to drive equipment.
- Options, to customer specs
We also propose end point system and consumables.
ALPSITEC, also specialist in Vision systems, develops specific tools for inspection on SOLAR Cells production lines.
Come and see us!
Product Categories
101 Photovoltaic Device Manufacturing
- PV: Cells
200 Packaging and Assembly Equipment
- Backgrind; Slicing; Lapping; Polishing Equipment
206 PV Equipment
- Inspection and Metrology
- Integration and Automation
207 Process Equipment
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
401 Sub-systems
- Cameras - Still; CCD; Video & Monitors