SEMICON Europa 2016
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E550 E
Alpsitec
(
Booth
1507
)
The E550 E is a CMP tool for Microelectronic, PV and MEMS. Two plates design, cassette to cassette handling, process of 2” to 8” wafers, number of functions and possible tool adaptations, makes the E550 perfect for production lines and intense R&D.
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