SEMICON Korea 2018

Sessions Speakers Exhibitors Products Press Releases Floor Plan

AUROS Technology, Inc. 

MERCURY (Pellicle/Mask Inspection System)

This is an outgoing QC solution to pellicle manufacturer as well as incoming QC solution to mask manufacturer, captive shop and every site using pe... More...

OL-100n (Overlay Metrology System, 150/200mm WF)

It is a brand new metrology system for 150/200mm wafer measurement. As a newly developed system, it helps to measure overlay and CD with greatl... More...

OL-300n (Overlay Metrology System, 300mm WF)

This is the 1st version of Auros metrology system. It is able to applied to the technology node from 2x to 9x nm. More...

OL-600n (Overlay Metrology System, 300mm WF)

OL-600n is the 2nd version of overlay metrology system Auros Technology manufactured. It was released in 2013 and well recognized in many customer ... More...

OL-700n (Overlay Metrology System, 300mm WF)

OL-700n is the 3rd generation of overlay metrology system that is manufactured by Auros Technology. It is the world best accuracy and throughput an... More...