SEMICON Korea 2018
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CYMECHS
 
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Aligner
VEGA Series Wafer Notch Finding & Centering Center DELTA PICK & PLACE Mode
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Robot (ATM Robot, VTM Robot)
QUADRA Series
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Load Port Module
DURAPORT Series Up / Down Mapping Various Safety Interlock Wafer ID Reading applied by RFID
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EFEM
PHOENIX Series Design Footprint optimally FFU RPM MODE, Pressure MODE Possibility to install PM-ELEC RACK on the top of EFEM.
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Vacuum Cluster Tool
Cymechs provides the Aries series of 300mm vacuum transfer module. Available in 4, 6 and 7 sided configurations, the Aries Transfer module featur...
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