SEMICON Korea 2018

EV Group Korea Ltd. 

EVG®150XT

Automated Photoresist Resist System for logic and memory advanced packaging applications More...

EVG®50

Automated Metrology System for industry leading high-accuracy measurements More...

IQ Aligner® NT

Automated Mask Alignment System More...

EVG®7200 LA SmartNIL®

SmartNIL®-based Nanoimprint Lithography System More...

EVG®850TB/DB (XT Frame)

Automated Temporary Wafer Bonding / Debonding Systems. Next-generation thin wafer processing for high-volume 3D IC manufacturing, Based on EVG’s ne... More...

GEMINI®FB XT

Automated Production Fusion Wafer Bonding System combining several performance breakthroughs to surpass ITRS requirements for wafer bonding More...