SEMICON Korea 2019
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Workforce Pavilion - Cleaning & CMP Tutorial
(
Room
#308, COEX
)
24 Jan 19
9:00 AM
-
12:00 PM
Speaker(s):
Ji Chul Yang, Research Fellow / Vice President, SK hynix;
Won-Seob Cho, Head of Semiconductor Research, BASF Electronic Materials R&D Center Asia, BASF;
Seung-Ki Chae, Professor, Sungkyunkwan University
This tutorial aims to provide a basic course for new engineers who are working at cleaning & CMP technology related area. With this practical lecture from device makers, material suppliers and academia, we expect you will learn the challenges and fundamental technologies in cleaning & CMP process. Too see session agenda,
Please Click here
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