Application of Design of Experiment Methods for Effective Process Probing and Parameters Optimization in Industrial Coating Deposition
(Room Room 104-B)
30 Apr 19
10:40 AM
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11:00 AM
Tracks:
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The properties of a magnetron sputtered coating depend on a number of parameters such as gas pressure, process temperature or average power. Therefore, for efficient, repeatable and reliable coating deposition in industrial conditions the appropriate parameter values need to be defined. However, selection of the proper parameter value cannot be made without testing various combinations of thereof. For example, to investigate influence of the combination of three values of pressure, gas ratio, temperature and average power would normally require 34 i.e. 81 test runs. In many cases, it is an unacceptable financial and time burden for the production line. This study reports on application of the Taguchi orthogonal table method for optimization of TiN and Al2O3 morphology and optical parameters at a reduced number of experiments. It will be shown that by using Taguchi method the number of test runs necessary to identify the influence of pressure, temperature, gas ratio, average power, power delivery (DC, pulsed-DC) and Bias voltage on coating properties can be dramatically decreased. Finally, the suitability of the Taguchi method to indicate the best parameter value configuration for optimization of selected coating property will be discussed.