2021 Nashville AISTech

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Extremely Rapid Ablation and In-Situ EBSD Preparation Using a Femtosecond Laser in the FIB-SEM (Room Virtual)

When carrying out crystallography using electron backscatter diffraction (EBSD), the major time-limiting factor is sample preparation. The use of a femtosecond laser facilitates extremely fast sample machining and surface preparation with minimal sample damage, precisely locating, extracting and preparing specific regions of interest. The integration of a laser ablation chamber on the focused ion beam (FIB)-scanning electron microscopy (SEM) allows access to buried features and preparation of surfaces suitable for EBSD without time-consuming FIB milling. Several laser-prepared metal surfaces suitable for EBSD grain mapping will be shown. Total preparation time is under 5 minutes, enabling extremely rapid inclusion, grain and failure analysis workflows on the nanometer scale.