SEMICON Korea 2018

Sessions Speakers Exhibitors Products Press Releases Floor Plan

Phase-Shift,Transmittance Measurement System MPM

Phase-Shift, Transmittance Measurement System MPM193EX is an industry de facto standard measurement system that measures phase shift and transmittance of EPSM and APSM. MPM193 EX measures Phase shift over a micro area of 1μm scale or less.