SEMICON Korea 2018
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EUV Mask Blanks Inspection and Review System ABICS
Lasertec Korea Corporation
(
Booth
D630
)
EUV Mask Blanks Inspection and Review System ABICS E120 detects printable phase defects and enabling defect management for EUV mask blanks through wavelength 13.5nm(EUV) laser.It is possible to measure phase defects of width 50nm and height 1nm.
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