SEMICON Korea 2018
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Mask Inspection System MATRICS X810EX Series
Lasertec Korea Corporation
(
Booth
D630
)
MATRICS X810EX Series feature high sensitivity and throughput at the lower cost of ownership targeted for 20nm-7nm design nodes with the new 213nm QCW laser source. Optimized to have a 28% faster scan rate than previous products.
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