SEMICON Korea 2018
Tweet
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
New Single Wafer Processor
LSE Co., Ltd.
(
Booth
C616
)
NSM-series is a single wafer processor that consists of 12 chambers and an advanced chamber structure & wafer transport module to improve small size particle control and throughput in the process application under 20nm technology node.
Home
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
Tweet
Login
|
Back to top
ChirpE