Sensors Expo 2016
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Capacitive micromachined ultrasonic transducers
Fraunhofer Institute for Photonic Microsystems IPMS
(
Booth
535
)
CMUTs are manufactured by means of micromechanical manufacturing processes, yielding extremely compact devices. As sensors are integrated with CMOS circuits in a monolithic fashion, complete analysis systems can be designed on a single chip.
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