SEMICON Europa 2016

Sessions Speakers Exhibitors Products Press Releases Floor Plan

Alpha Plasma: Q150 Microwave Etcher

The Alpha Q Series Microwave Etchers are used mainly for Photoresist Ashing & De-scum Processes. Also used for Surface Preparation prior to deposition, SU8 & PI Lateral Etching and other Sacrificial layers in MEMS/NEMS Applications.