SEMICON Europa 2016
Tweet
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
Cluster Configuration for plasma etching & deposit
SENTECH Instruments GmbH
(
Booth
1244
)
SENTECH Clusters comprise plasma etching and / or deposition modules, transfer chamber & vacuum loadlock or cassette station. Transfer chambers including handling robot are available with three to six ports. Up to two cassette stations can be used.
Home
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
Tweet
Login
|
Back to top
ChirpE