SEMICON West 2016

Sessions Speakers Exhibitors Products Press Releases Floor Plan Buzz

Rotary Feedthrough, Rotary Sealing Unit

Rotary, Reciprocating, Rotary at the same time Reciprocating, Multiple Rotary Co-axial, Muti-axial. ․ Media : Reactive gas, liquids, Etc. Temperature Range : -20℃ ~ + 150℃ without cooling system. ․ In Vacuum : < 10-8 torr. In Pressure : < 15 bar.