SEMICON Korea 2018
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OL-100n (Overlay Metrology System, 150/200mm WF)
AUROS Technology, Inc.
(
Booth
D712
)
It is a brand new metrology system for 150/200mm wafer measurement. As a newly developed system, it helps to measure overlay and CD with greatly fast throughput and much better performance compared to the current tools used in the customer fabs.
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