SEMICON Europa 2016

KBTEM-OMO (Belarus) is:

• Over 50 years in microelectronics engineering


• High level vertical integration in design and manufacturing


• Field proven tools for 1 µm, 0.6 µm, 0.35 µm, 0.13 µm and 90 nm technology node


• Total solution provider for defect free mask manufacturing


• Maskless lithography solution


• Variety of wafer inspection systems


• Unique solution for double-side lithography


• Brand new tools only, no secondhand or refurbished tools

KBTEM-OMO performs scientific and technical development and production of special opto-mechanical process equipment as well as inspection and measurement equipment used in microelectronics products manufacture:

• laser pattern generators for mask and wafer patterning;


• wafer steppers;


• large-field steppers;


• mask aligners;


• laser-based mask repair systems;


• automatic mask inspection systems with high detection threshold,


• wafer inspection tools for macro and micro defect inspection

Product Categories

- Lithography Systems for Wafer Level Packaging; Bumping; 3D Interconnect Aligners

- Defect; Particle; Bump; Contamination Detection, Review or Inspection
- Die Inspection; Die Shear
- Line Width; Critical Dimension (CD) Measurement
- Microscopes: Optical Microscopes
- Overlay Measurement
- Plate Inspection Equipment
- Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation

- Double sided mask aligner

- Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint

- Transfer lithography masks; Polymer masks; templates (for Nanoimprint)

- Photo Masks; Finished or Patterned

- Computer; Control; Communication; Data Acquisition Systems
- Exposure; Illumination Sources - Laser; Lamp; X-ray & other
- Optics; Lens Products; Auto-Focus Systems
- Process Monitoring systems

- Mask Making software & simulation

- Lithography; Patterning service
- Mask Making Fabrication and Repair
- Measurement; Inspection Service