SEMICON Europa 2016

KLA Corporation (SPTS Division) 

Booth 1115

Newport, Gwent,   
      United Kingdom

SPTS Technologies, an Orbotech company, designs, manufactures, sells, and supports advanced etch, PVD, and CVD wafer processing equipment and solutions for the global semiconductor and micro-device industries, with focus on the Advanced Packaging, MEMS, high speed RF device, power management and LED markets.



With the acquisition of SPTS, Orbotech is able to offer a broader range of process solutions for Advanced Packaging, which includes Orbotech’s Inkjet solutions for die level printing and UV Laser Drilling for through mold vias.



SPTS has manufacturing facilities in Newport, Wales and Allentown, Pennsylvania, and operates across 19 countries in Europe, North America and Asia-Pacific.



For more information please visit www.spts.com and www.orbotech.com.




Product Categories

204 MEMS Equipment
- Deep RIE etching; Dry Etching

205 Nanotechnology Equipment and Tools
- Equipment, Nanotechnology Tools

207 Process Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment