SEMICON Europa 2016

Pfeiffer Vacuum GmbH 

Booth 1266

Annecy Cedex,   
      France

For 125 years, our name has served as a guarantee for advanced vacuum technology, high quality and comprehensive vacuum solutions, as well as first-class service.



Our product line includes turbopumps, roughing pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we offer low vibration vacuum solutions. Additionally, Pfeiffer Vacuum offers leak detectors and solutions for Airborne Contamination Management (AMC).



Pfeiffer Vacuum has over 2,250 employees worldwide and more than 20 subsidiaries.  The corporation is listed on the German TecDAX stock index.


Product Categories

203 Inspection & Measurement Products
- Leak Detection Systems - Vacuum or Gas

400 Components, Parts & Accessories
- Sensors
- Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants

401 Sub-systems
- Process Monitoring systems
- Pumps, Vacuum