SEMICON Europa 2016

SPS Group B.V. 

Booth 168

Putten, Gelderland  
      Netherlands

Featured items

Atomic layer deposition AT400 - R&D table top ALD systeem for growing conformal thin films at smaller scales. More information?



Safe wafer storage? Moisture barrier bags. More information?



Do you want an Eco-Friendly UV LED Mask Aligner? See our NEW Mask Aligner More information?



Handling & Shipping

H-SQUARE
up to 450mm: Vacuum Wands, Mask-/Substrate Handles, Metal Cassettes, Flat/Notch-finders &Transfer Systems

EPAK Wafer Shipping Boxes & Carriers

ULTRON SYSTEMS Adhesive Films, Applicator & Remover



Wet Processing & Cleaning:

HEATEFLEX DI Water- & Chemical Heating Systems.

PROMAC Heated (Quartz) Process Baths.

PILLAR Chemical Pumps & PFA Fittings

LEVITRONICS Pumps.

MALEMA & TOKYO KEISO Flow Control Products

POLOS Spin Processors.

KAIJO Ultrasonic Showerheads.

PROSYS Megasonic Arrays & Megpie.



Photolithography:

MIDAS Mask Aligners LED

POLOS Hotplates & Spin Process Stations.



Diffusion:

HILTEX Insulation Quartz Collars/Discs.

THERMCRAFT Horizontal Diffusion Furnace Elements.

TEM Gas Filters.


Product Categories

200 Packaging and Assembly Equipment
- Backgrind; Slicing; Lapping; Polishing Equipment
- Dispensing Systems
- Wafer Mount; Taping Equipment

203 Inspection & Measurement Products
- Flat; Notch Finding System

207 Process Equipment
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
- Coat; Develop; Resist Processing; Track Equipment
- Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
- Plating; Electro Chemical Plating; Deposition Systems
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
- Transfer Systems for Wafer; Reticles or FPD's
- Wafer Identification; Marking Equipment

304 Mask Making Materials
- Mask and Reticle Handling Products

308 Substrates
- Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
- Gallium Arsenide (GaAs); Sapphire Substrates

401 Sub-systems
- Exposure; Illumination Sources - Laser; Lamp; X-ray & other
- Pumps, for Fluids
- Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
- Ultrasonic Generators; Transducer and Monitoring Systems

500 Factory Monitoring & Control Systems (FMCS)
- Chemical; Pure Water; Fluid Monitoring & Control Systems

900 Support Products
- Furniture; Storage; Cabinets