MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.
Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control and information technology, ozone generation and delivery, RF & DC power, reactive gas generation, and vacuum technology. With the 2016 acquisition of Newport Corporation, we have expanded to include lasers, optics and motion control.
Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications as well as environmental monitoring, life sciences, process manufacturing, defense and R&D.
Product Categories
303 Gases
- Analytical Instrumentation Mixtures
401 Sub-systems
- Motion control systems; Servo control systems & Components
- Plasma Sources; Controls; Monitoring; Diagnosis
- Power Supplies; RF Generators; Converters; Electrical Cond.
500 Factory Monitoring & Control Systems (FMCS)
- Gas Monitoring Equipment; RGA's; TGO compliance
- Process Controls