Nano-Master, Inc. products are used in LED, MEMS, Optoelectronics, Nanotechnology, Photovoltaic, Semiconductor and Space Simulation applications. Nano-Master products include PECVD systems for deposition of SiO2, Si3N4, DLC, CNT and Graphene; PA-MOCVD Systems for InGaN and AlGaN; Sputtering Systems (reactive, co-sputtering, combinatorial); Thermal and E-beam Evaporators, Ion Beam and Reactive Etching Systems; Atomic Layer Etching, Atomic Layer Deposition Tools; Thermal Vacuum Systems; Megasonic Cleaning Systems and Photoresist Stripping Equipment.
Deposition
E-Beam and Thermal Evaporation, PECVD, PLD, DLC, DC & RF Sputtering, Ion Beam Sputtering
Etching
RIE, DRIE, ICP, Ion Beam Milling, RIBE, Plasma, ALE
Growth
ALD, PA-MOCVD, CNT, Graphene
Surface Treatment
Ion Beam, PIII, Plasma, RTP
Cleaning
- Dry: Ion Beam, Plasma
- Wet: Megasonic, Brush, SC1, SC2, Piranha, O3DIW
Other,
Device Testing System for Space Simulation, Heated Platens, Plasma Sources, Resist Stripping Systems
Product Categories
101 Photovoltaic Device Manufacturing
- PV: Stand-Alone Systems
200 Packaging and Assembly Equipment
- Cleaning; Washing Equipment for Assembly & Packaging
204 MEMS Equipment
- Deep RIE etching; Dry Etching
205 Nanotechnology Equipment and Tools
- Equipment, Nanotechnology Tools
206 PV Equipment
- Thin Film
207 Process Equipment
- Cleaning; Washing Equipment for Assembly & Packaging
- Coat; Develop; Resist Processing; Track Equipment
- Crystal Growing & Machining Equipment
- Deposition; (CVD, PVD, ALD, Plating)
- Deposition; PVD; Sputtering; Evaporation Equipment
- Epitaxy Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Ion; E-Beam Milling Etching Equipment
- Thermal Processing
- Transfer Systems for Wafer; Reticles or FPD's
304 Mask Making Materials
- Mask and Reticle Handling Products
307 Process Materials
- Plasma; Ion Sources
400 Components, Parts & Accessories
- Chucks for Wafer and other Substrates
401 Sub-systems
- Plasma Sources; Controls; Monitoring; Diagnosis