SEMICON West 2016

VAT Vakuumventile AG 

Booth 817

San Jose, CA  
      United States

VAT is the leading global developer, manufacturer and supplier of high-performance high-end vacuum valves, multi-valve modules, edge-welded bellows and related value-added services.



VACUUM VALVES - VAT has an impressive 50+ year history manufacturing valves.  VAT valves are proven in their quality and reliability making VAT vacuum valves the preferred valve of choice for demanding design requirements.



VAT MODULES  - VAT’s custom engineered integrated module solutions simplify our customers system and supply chain.



VAT CUSTOM ENGINEERED EDGE WELDED BELLOWS  - VAT Bellows adhere to the highest quality and cleanliness standards of the most demanding applications.  Our highly automated bellows stamping and welding processes ensure stable production and ramp readiness.



VAT GLOBAL SERVICES allows customers to optimize performance, reduce cost of ownership and reduce downtime.  Retrofit your system and take advantage of the latest technologies, VAT genuine parts for service, service contracts available, training and VAT provides field service on-site or with a quick turnaround from a location near you.



Stop by VAT Booth #817 and meet our team!


Product Categories

101 Photovoltaic Device Manufacturing
- PV: Modules
- Solar Thermal

202 Other Equipment
- Repair; Rework Equipment
- Space simulation; Vacuum chambers
- Vacuum drying & out gassing Systems

206 PV Equipment
- Other

207 Process Equipment
- Transfer Systems for Wafer; Reticles or FPD's

400 Components, Parts & Accessories
- Flow Control: Valves; Meters; Gauges; Regulators; MFC's
- Vacuum Systems Components and Accessories

401 Sub-systems
- Handling; Transfer; Loading Systems; Lifting devices

900 Support Products
- Device; Wafer; Display Panel Handling Products