SEMICON West 2016

Harmonic Drive LLC 

Booth 639

Peabody, MA  
      United States

Harmonic Drive is a world leader in the design, development and manufacturing of zero-backlash motion control products. Our servo-actuators, gearheads, and gear components achieve accuracy better than 30 arc-seconds and repeatability of +/- 5 arc-seconds. A wide variety of standard and customized designs are available to meet the high precision requirements of semiconductor manufacturing equipment and robotics. Application engineers with expertise in motion control are available to assist you with your concept and detailed designs, free of charge. Harmonic Drive® products are used extensively in wafer and flat panel transfer robots as well as CMP and ion implant equipment. Our products provide the highest torque density of any product in its class and are available in sizes ranging from 13mm to 330mm in diameter. Our US Headquarters and manufacturing facility in Massachusetts, is ISO 9001 and AS9100 registered and produces the majority of products we sell.



 


Product Categories

401 Sub-systems
- Gear reducers; Gearheads; Geardrives
- Motion control systems; Servo control systems & Components

502 Material Handling Systems
- Robotics; Transfer Systems