SEMICON West 2016

Onto Innovation 

Booth 6543

Wilmington, MA  
      United States

Rudolph Technologies, Inc. is a leader in the design, development, manufacture and support of defect inspection, lithography, process control metrology, and process control software used by semiconductor and advanced packaging device manufacturers worldwide. Rudolph delivers comprehensive solutions throughout the fab with its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market of their devices.  Headquartered in Wilmington, Massachusetts, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company’s website at www.rudolphtech.com.


Product Categories

200 Packaging and Assembly Equipment
- Litho for WLP: Bumping; 3D Interconnect Aligners

203 Inspection & Measurement Products
- Defect; Particle; Contam. Detection/Review/Inspect.
- Die Inspection; Die Shear
- Film Thickness; Uniformity Measurement; Ellipsometer
- Line Width; Critical Dimension (CD) Measurement
- Metrology; Topology; Nanotopography; Flatness; Cryst.Orient.
- Microscopes: Confocal Scanning; 3-D Video
- Microscopes: Optical Microscopes
- Overlay Measurement

208 Test Equipment
- Probe Card Maintenance and Analysis Systems

602 Manufacturing Software
- Factory Automation; Cell Controller Software
- Yield Mgmt; Process Control Software