SVCS Process Innovation designs and manufactures batch horizontal furnaces for the semiconductor and photovoltaic industries. SVCS experience is based on a long history of the semiconductor industry in former Czechoslovakia. Besides the domestic market, the installation base, supported by SVCS local offices and distributors, include China, Taiwan, Russia, India, Malaysia and other European countries. SVCS participates in the EU-funded research programs to achieve higher solar cell efficiency. SVCS main products are atmospheric, PECVD and LPCVD thermal reactors for both the mass production and/or R&D applications. Their key features are high process uniformity, reduced cost of ownership and an in-house developed state-of-the-art control system. This control system is also extensively used for refurbishment and modernization of existing third party furnaces Other products include various gas source systems like gas cabinets, valve manifold boxes and custom equipment gas manifolds
Product Categories
206 PV Equipment
- Cells
207 Equipment, Process
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
401 Sub-systems
- Gas; Liquid delivery panels as subsystems
500 Factory Monitoring & Control Systems (FMCS)
- Gas Handling - Cabinets; Control; Supply Systems