*Products :
Wafer Cleaning system
Single wafer cleaner: SU-3300, SU-3200, SU-3100
Spin Scrubber: SS-3200, SS-3100
Wet station: FC-3100, FC-821L, WS-620C/WS-820L
Resist processing system
Coat/develop track DT-3000、RF-310A、SK-60EX/80EX
Frontier project
Single wafer cleaner SU-2000
Spin scrubber SS-80EX
Compact wet station CW-1500
Spray coater SC-80WX
Wafer pattern inspection system ZI-2000
Direct imaging system for advanced packaging DW-3000
Annealing system
Flash lamp annealer LA-3000-F
Laser annealer LT-3000/3100
Film thickness measurement system
Ellipsometric film thickness measurement system RE-3100/3300
Spectoscopic film thickness measurement system VM-1200/1300、VM-2200/3200、VM-1020/1030
Product Categories
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
- Coat; Develop; Resist Processing; Track Equipment