scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for coating and etching processes in the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as research and development environments.
Due to their flexible and modular design, the systems can be configured according to customer specific requirements. Amongst others by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support.
Technology Portfolio
- Ion Beam Trimming (IBT)
- Ion Beam Etching and Milling (IBE/IBM)
- Dual Ion Beam Deposition (DIBD)
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
- Reactive Ion Etching (RIE)
- Magnetron Sputtering
- Plasma Cleaning
Product Categories
202 Equipment, General Use
- Vacuum drying & out gassing Systems
204 Equipment, Mems
- Deep RIE etching; Dry Etching
205 Equipment, Nanotechnology
- Equipment, Nanotechnology Tools
207 Equipment, Process
- Coat; Develop; Resist Processing; Track Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Ion; E-Beam Milling Etching Equipment
400 Components, Parts & Accessories
- Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
401 Sub-systems
- Plasma Sources; Controls; Monitoring; Diagnosis