Tera Semicon provides diffusion oxidation/annealing and ALD/LPCVD batch furnaces in semiconductor area.
Product Categories
202 Equipment, General Use
- Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
207 Equipment, Process
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
903 LED
- FPD Glass Substrate Processing Equipment, Materials and Parts
- OLED Related Equipment and Materials, Panel and Module