We are a recognized leader in the design and manufacture of Diffusion Furnace Chambers for wafer fabrication. Our offerings of standard gauge chambers, from 400 degC - 1350 degC; Low Mass/Fast Ramp Chambers temperature ranges from 200 degC - 1250 degC Speciality chmabers to 1750 degC are available. We also provide Direct Replacement Horizontal and Vertical 200 & 300mm heaters for TEL / Kokusai / ASM / Aviza / SVG Thermco, as well as Torch elements, Vestibule Blocks and Soft Collars. We can provide a refurbishment service on select vertical elements at a greatly reduced cost as well.
Product Categories
202 Equipment, General Use
- Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
- Repair; Rework Equipment
207 Equipment, Process
- Crystal Growing & Machining Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
400 Components, Parts & Accessories
- Heating elements; coils; insulation; vestibule blocks and other Furnace components