Entegris creates a material advantage for its customers with a wide range of products that improve productivity,performance and technology in demanding,advanced manufacturing environments. These contamination control and microenvironment solutions are used in the processing and manufacturing of semiconductors and other high-performance applications such as HBLED,photovoltaic,data storage,medical,and flat panel displays.As an ISO 9001 certified company,Entegris has manufacturing,customer service and research facilities throughout Asia,Europe,Japan and North America.
Product Categories
200 Equipment, Assembly
- Cleaning; Washing Equipment for Assembly & Packaging
- Device Handling; Feeding Systems
206 PV Equipment
- Thin Film
- Wafers
207 Equipment, Process
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
- Coat; Develop; Resist Processing; Track Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Environmental Enclosures; Minienvironments
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Ion Implantation Equipment
- Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
- Plating; Electro Chemical Plating; Deposition Systems
- Spin on Glass (SOG); on Dielectric (SOD) Track systems
- Transfer Systems for Wafer; Reticles or FPD's
301 Materials, Chemicals & Solids
- Acids; Etchants
- Buffers; Alkalis; Bases
- Cleaning Chemicals; Solvents; Strippers
- DI; UP Water
- Dopants; liquid or solid
- Other Specialty Chemicals
- Photo Resist; Developers & Ancillaries (incl. Adhesion promoter (HMDS); Primer; Anti-Reflective Coat
- Solids
- Spin on glass material
- Surface protection material; coatings
304 Materials, Mask Making
- Mask and Reticle Handling Products
306 PV Materials
- Consumables
- Gases and Liquid Chemicals
307 Materials, Process
- CMP; Grind; Lap; Polish; Abrasive materials
- Photo Masks; Finished or Patterned
- Process Chamber Components; Graphite; Carbon Fiber Carbon (CFC); Pyrolytic Boron Nitride (PBN)
308 Materials, Substrate
- Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
400 Components, Parts & Accessories
- Filters, Getters, Purifiers, Catalysts for Gases
- Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
- Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
401 Sub-systems
- Gas; Liquid delivery panels as subsystems
- Pumps, for Fluids
- Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
500 Factory Monitoring & Control Systems (FMCS)
- Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
- Chemical; Pure Water; Fluid Monitoring & Control Systems
- Gas and Other Generation Systems
- Gas Handling - Cabinets; Control; Supply Systems
- Process Controls
501 HVAC, Temperature, Humidity, Contamination Control
- Clean Rooms
- Contamination Control; HEPA Filtering Systems
- HVAC; Temperature; Humidity Systems and Control
701 Manufacturing Services or Consulting
- Assembly
- Clean Room; Contamination Control
- Wafer Handling