SEMICON Korea 2018

Brooks Automation 

Booth D820

Chelmsford, MA  
      United States

Brooks is a leading worldwide provider of automation and cryogenic solutions for multiple markets including semiconductor manufacturing and life sciences. Brooks' technologies, engineering competencies and global service capabilities provide customers speed to market and ensure high uptime and rapid response, which equate to superior value in their mission-critical controlled environments. Since 1978, Brooks has been a leading partner to the global semiconductor manufacturing market and, through product development initiatives and strategic business acquisitions, has expanded offerings to meet the needs of customers in the life sciences industry, analytical & research markets and clean energy solutions. Brooks is headquartered in Chelmsford, MA, with direct operations in North America, Europe and Asia. For more information, visit www.brooks.com.


Product Categories

207 Equipment, Process
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing

401 Sub-systems
- Pumps, for Fluids
- Pumps, Vacuum

502 Material Handling Systems
- Robotics; Transfer Systems

701 Manufacturing Services or Consulting
- Automation & Robotics
- Clean Room; Contamination Control
- Equipment; Hardware; Product Design, Integration and Manufacturing
- Wafer Handling