SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit http://www.suss.com
Product Categories
101 Photovoltaic Device Manufacturing
- PV: Stand-Alone Systems
200 Equipment, Assembly
- Lithography Systems for Wafer Level Packaging; Bumping; 3D Interconnect Aligners
- Wafer Level Bonders
- Wafer Mount; Taping Equipment
201 Equipment, Flat Panel Display
- Alignment Film Coating Equipment
202 Equipment, General Use
- Repair; Rework Equipment
203 Equipment, Inspection & Measurement
- Overlay Measurement
204 Equipment, Mems
- Wafer Level Bonders
205 Equipment, Nanotechnology
- Equipment, Nanotechnology Tools
207 Equipment, Process
- Bumping Systems
- Coat; Develop; Resist Processing; Track Equipment
- Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
- SOI Bonders; Temporary Bonders; De-Bonders
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
301 Materials, Chemicals & Solids
- Photo Resist; Developers & Ancillaries (incl. Adhesion promoter (HMDS); Primer; Anti-Reflective Coat
307 Materials, Process
- Photo Masks; Finished or Patterned
701 Manufacturing Services or Consulting
- Wafer Handling
903 LED
- High-Brightness LED and High-Powered Devices
- OLED Related Equipment and Materials, Panel and Module