LOT Vacuum, the company for developing, manufacturing, and marketing Vacuum Pump for processing semiconductors and LCD markets, began its business with undertaking DryVacuum pump business part from Leybold in Germany. DuraDry™ Series, the original product name of LOT Vacuum, adopted innovative Split-Flow Screw Design, so that it can correspond to all processes of semiconductor and LCD based on improved performance and credibility. DuraDry™ Series has been approved by customers for its outstanding ability to handle Heavy Duty Application which produces massive amount of process by-products.
Product Categories
202 Equipment, General Use
- Vacuum drying & out gassing Systems
206 PV Equipment
- Thin Film
207 Equipment, Process
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
401 Sub-systems
- Pumps, Vacuum