SEMICON Korea 2018

A&AT 

Booth A532

Seoul,   
      Korea (South)

A&AT manufactures and repairs magnetic fluid seal for LCD, semiconductor, OLED equipments and vacuum robots.



Also, we supply parts for LCD, semiconductor, OLED processes including insulator bushings, slim bearings etc.



 As a manufacturer of Magnetic Fluid Seals, we develop and customize seals according to our customer’s needs as well as provide repair services for cost efficiency.



With more than 20 years of technology and know-how, our company continuously has supplied and repaired semiconductor parts for LCD, OLED process to all over the world.






Product Categories

202 Equipment, General Use
- Vacuum drying & out gassing Systems

203 Equipment, Inspection & Measurement
- Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation

207 Equipment, Process
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment

400 Components, Parts & Accessories
- Bearings; Shaft Collars
- Magnetic Components; Heads
- Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p

401 Sub-systems
- Optics; Lens Products; Auto-Focus Systems
- Pneumatic Systems; Pneumatic rotary spindles
- Pumps, Vacuum