Swagelok Company provides a broad line of high-purity and ultrahigh-purity fluid system components to the global semiconductor manufacturing industry. Swagelok® products are trusted in critical processes such as ALD, CMP, CVD, PVD, diffusion, etch, and wafer cleaning. Our line of fluid system components includes ALD process valves, springless and tied diaphragm valves, bellows valves, gas pressure regulators, gauges, transducers, filters, modular gas system components, tubing, VCR®, Micro-Fit®, compression and flare fittings, PTFE valves, PFA fittings and tubing, concentration monitoring equipment, and orbital welding systems. All have an established record of quality and reliability in semiconductor fluid applications. Through a strategic business unit, Swagelok Semiconductor Services Company, Swagelok facilities a focus on the industry and provides enhanced responsiveness for field engineering, prototyping and product development.
Product Categories
202 Equipment, General Use
- Welding Equipment
400 Components, Parts & Accessories
- Filters, Getters, Purifiers, Catalysts for Gases
- Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
- Sensors
- Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p