E+H was founded in 1968 and offers since 1978, for more than 38 years now, a wide variety of measurement tools for the Semiconductor and PV in process control and laboratory characterization.
Contactless metrology tools for 1" up to 450mm Wafers consisting out of Silicon, Quartz, Sapphire etc, but also solutions for other materials such as plastic displays are available.
Most metrology tools can be integrated into our own full automated wafer handling solutions (belt driven, robot).
This long term support for our customers combined with robust, reliable, mature and low maintenance products makes E+H a strong partner on which you can rely on.
First company showing a 300mm tool at the Semicon in 1996!
First company showing a 450mm tool at the Semicon in 2008!
Almost 3200 sold tools
Product Categories
203 Inspection & Measurement Products
- CV (capacitance-to-voltage) Probe systems
- Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
- Resistivity Measurement; 4 point probe; Sheet resistance
- Stress; Refractive Index; Reflectivity & Conductivity Measurement
- Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
205 Nanotechnology Equipment and Tools
- Equipment, Nanotechnology Tools
206 PV Equipment
- Inspection and Metrology
- Modules
207 Process Equipment
- Transfer Systems for Wafer; Reticles or FPD's
402 PV Systems
- Measurement and Control Technology
700 Manufacturing Services
- Calibration & Reference Standards
- Measurement; Inspection Service