SEMICON Europa 2016

Entegris S.A.S. 

Booth 1507

Moirans,   
      France

Entegris, Inc. (NASDAQ: ENTG) is a leading provider of yield-enhancing materials and solutions for advanced manufacturing processes in the semiconductor and other high-technology industries.



These solutions include:



•  Filtration products that purify process gases, fluids and the ambient fab environment



•  Liquid systems and components that dispense, control, analyze or transport process fluids



•  Gas delivery systems that safely store and deliver toxic gases



•  Specialty chemistries for deposition and cleaning at advanced nodes



•  Wafer carriers and shippers that protect semiconductor wafers from contamination and breakage



•  Specialty coatings that provide high-purity surfaces for wear-resistance, corrosion protection and smoothness



•  Premium graphite and silicon carbide for high-performance applications



•  Shippers and trays for protecting and transporting disk drive components



•  Processes to recover valuable metals from e-waste


Product Categories

200 Packaging and Assembly Equipment
- Dispensing Systems

207 Process Equipment
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Environmental Enclosures; Minienvironments
- Transfer Systems for Wafer; Reticles or FPD's

301 Chemicals & Solids
- Cleaning Chemicals; Solvents; Strippers
- Dopants; liquid or solid
- Other Specialty Chemicals

303 Gases
- Dopant Gases
- Other Specialty; Mixed Gas

304 Mask Making Materials
- Mask and Reticle Handling Products

307 Process Materials
- CMP; Grind; Lap; Polish; Abrasive materials
- Process Chamber Components; Graphite; Carbon Fiber Carbon (CFC); Pyrolytic Boron Nitride (PBN)

400 Components, Parts & Accessories
- Chucks for Wafer and other Substrates
- Filters for Liquid; Oil
- Filters, Getters, Purifiers, Catalysts for Gases
- Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
- Gaskets; Seals; O rings; Elastomers; Resins
- Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
- Raw Material & Custom components; Plastic
- Sensors

401 Sub-systems
- Process Monitoring systems
- Pumps, for Fluids

500 Factory Monitoring & Control Systems (FMCS)
- Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
- Chemical; Pure Water; Fluid Monitoring & Control Systems
- Gas and Other Generation Systems
- Gas Handling - Cabinets; Control; Supply Systems
- Process Controls

501 HVAC, Temperature, Humidity, Contamination Control
- HVAC; Temperature; Humidity Systems and Control

700 Manufacturing Services
- Parts Cleaning; Micro Contamination